Title :
Prototype Design of a Thin-Film Bulk Acoustic-Wave Resonator by the Finite Element Method
Author :
De Santis, V. ; Feliziani, M. ; Buccella, C. ; Tognolatti, P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of L´´Aquila, L´´Aquila
fDate :
3/1/2009 12:00:00 AM
Abstract :
A thin film bulk acoustic wave resonator (FBAR) used in the RF frequency region of a few gigahertz is considered and its impedance is evaluated by using a harmonic analysis with the three-dimensional finite element method. In particular, the spurious characteristics caused by variations in the electrode area, as well as all the resonant modes and the mode shapes are analyzed. A design procedure is presented by using a prediction software tool. An experimental prototype is built and the measured results are compared to the numerical ones.
Keywords :
electrodes; finite element analysis; surface acoustic wave resonators; thin film devices; 3D finite element method; RF frequency region; electrode; harmonic analysis; mode shapes; prototype design; resonant modes; thin-film bulk acoustic-wave resonator design; Film bulk acoustic wave resonator (FBAR); finite element analysis; multiphysics; piezoelectric material;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2009.2012646
