DocumentCode
1178179
Title
Selected topics in RF coplanar probing
Author
Wartenberg, Scott A.
Author_Institution
RF Micro Devices, Greensboro, NC, USA
Volume
51
Issue
4
fYear
2003
fDate
4/1/2003 12:00:00 AM
Firstpage
1413
Lastpage
1421
Abstract
The RF coplanar probe is a popular tool for launching high-frequency signals onto and off of a wafer. Physically contacting the die, it establishes a crucial link between the test system and wafer. Their proper use permits a higher degree of measurement accuracy compared to test fixturing. To augment the reader´s understanding, this tutorial reviews selected issues related to the design, construction, characterization, selection, calibration, and repeatability of RF on-wafer coplanar probes.
Keywords
MMIC; calibration; coplanar waveguide components; integrated circuit testing; probes; MMICs; RF coplanar probing; RFICs; calibration; high-frequency signals; repeatability; test system; Coaxial cables; Coplanar waveguides; Design automation; Fixtures; Integrated circuit measurements; Probes; Radio frequency; Radiofrequency integrated circuits; Semiconductor device modeling; System testing;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/TMTT.2003.809184
Filename
1193159
Link To Document