Title :
Fabrication of LiNbO/sub 3/ channel waveguides using water
Author :
Son, Yung-Sung ; Lee, Hyung-Jae ; Jhee, Yoon-Kyoo ; Shin, Sang-Yung ; Kim, Boo-Gyoun
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
fDate :
5/1/1992 12:00:00 AM
Abstract :
A channel waveguide formed in LiNbO/sub 3/ was fabricated by using distilled water instead of acids for proton exchange and a self-aligned SiO/sub 2/ cap for diffusion. It was demonstrated that the water reaction is an important reaction to cause the index change in proton exchange.<>
Keywords :
integrated optics; ion exchange; lithium compounds; optical waveguides; optical workshop techniques; water; LiNbO/sub 3/ channel waveguides; SiO/sub 2/; diffusion in solids; distilled water; index change; planar waveguide fabrication; proton exchange; self-aligned SiO/sub 2/ cap; water reaction; Hydrogen; Optical device fabrication; Optical polarization; Optical surface waves; Optical waveguides; Protons; Surface waves; Temperature; Titanium; Waveguide transitions;
Journal_Title :
Photonics Technology Letters, IEEE
