DocumentCode
1178965
Title
Detection of hot spots in thin metal films via thermal noise measurements
Author
Massiha, G.H. ; Chen, Tsong M. ; Scott, G.J.
Author_Institution
Dept. of Electr. Eng., South Florida Univ., Tampa, FL, USA
Volume
10
Issue
2
fYear
1989
Firstpage
58
Lastpage
60
Abstract
A technique to detect local hot spots in thin aluminum films is discussed. Electromigration-damaged aluminum films of different dimensions have higher effective noise temperatures than undamaged films (good conductors) when they have the same environmental temperature and carry the same current density. The differences in noise temperature are attributed to film local joule heating associated with voids or poor film adhesion to the substrate.<>
Keywords
aluminium; electromigration; metallic thin films; metallisation; thermal noise; Al films; IC interconnection; current density; electromigration; film adhesion; hot spot detection; local joule heating; noise temperatures; thermal noise; thin metal films; voids; Aluminum; Background noise; Conducting materials; Conductive films; Electromigration; Frequency; Noise measurement; Preamplifiers; Temperature distribution; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.32428
Filename
32428
Link To Document