Title :
Fabrication of submillimeter-radius optical waveguide bends with anisotropic and isotropic wet chemical etchants
Author :
Seto, Myron ; Deri, R.J. ; Yi-Yan, Alfredo ; Colas, Etienne ; Tomlinson, W. John ; Bhat, R. ; Shahar, Arie
Author_Institution :
Bellcore, Red Bank, NJ, USA
fDate :
2/1/1990 12:00:00 AM
Abstract :
Wet chemical etchants suitable for making GaAs/AlGaAs single-mode optical waveguide bends with radii as low as 300 μm for excess bend losses of 1 dB/90° and propagation losses as low as 1 dB/cm at λ=1.5 μm are described. Additional bend losses due to modal mismatch resulting from etchant anisotropy are investigated, and it is shown that in many cases such anisotropy does not limit bend performance
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; optical losses; optical waveguides; optical workshop techniques; 1 dB; 1.5 micron; 300 micron; AlGaAs-GaAs; III-V semiconductors; excess bend losses; fabrication; modal mismatch; propagation losses; single-mode optical waveguide; submillimeter-radius optical waveguide bends; wet chemical etchants; Anisotropic magnetoresistance; Chemicals; Gallium arsenide; Geometrical optics; Optical device fabrication; Optical losses; Optical waveguides; Performance loss; Propagation losses; Wet etching;
Journal_Title :
Lightwave Technology, Journal of
