Title :
Integration of thin film optoelectronic devices onto micromachined movable platforms
Author :
Wilkinson, Scott T. ; Kim, Young W. ; Jokerst, Nan M. ; Allen, Mark G.
Author_Institution :
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
The integration of a thin film optoelectronic device onto a micromachined movable platform is reported in this letter. This micro-opto-mechanical system, consisting of a thin film AlGaAs/GaAs double heterostructure p-i-n detector integrated onto a polyimide micromachined platform on silicon, has applications which range from fiber optic coupling to sensors. Fiber optic coupling is demonstrated using a stationary fiber positioned above the thin film detector. By applying a voltage between the platform and actuation strips, the platform moves and a change in fiber to detector coupling is observed.<>
Keywords :
III-V semiconductors; aluminium compounds; electro-optical devices; gallium arsenide; integrated optics; integrated optoelectronics; micromechanical devices; optical films; optical sensors; p-i-n photodiodes; photodetectors; AlGaAs-GaAs; AlGaAs/GaAs double heterostructure p-i-n detector; actuation strips; fiber optic coupling; fiber to detector coupling; micro-opto-mechanical system; micromachined movable platforms; polyimide micromachined platform; sensors; thin film; thin film optoelectronic devices; Gallium arsenide; Optical coupling; Optical fiber sensors; Optical fibers; Optoelectronic devices; PIN photodiodes; Polyimides; Semiconductor thin films; Thin film devices; Thin film sensors;
Journal_Title :
Photonics Technology Letters, IEEE
