Three-dimensional nanostructuring with femtosecond laser pulses

Author

Korte, Frank ; Koch, Jürgen ; Serbin, Jesper ; Ovsianikov, Aleksandr ; Chichkov, Boris N.

Author_Institution

Laser Zentrum Hannover e. V., Germany

Volume

3

Issue

4

fYear

2004

Firstpage

468

Lastpage

472

Abstract

The development of simple laser-based technologies for the fabrication of complicated three-dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes allowing to overcome the diffraction limit and to fabricate 3-D structures inside transparent materials. Examples on nanostructuring of metals, dielectrics, and polymers are presented.

Keywords

high-speed optical techniques; laser beams; laser materials processing; multiphoton processes; nanotechnology; complicated three-dimensional microstructures fabrication; dielectrics nanostructuring; diffraction limit; femtosecond laser pulse; metal nanostructuring; nonlinear multiphoton laser-matter interaction process; polymer nanostructuring; three-dimensional nanostructure; transparent material; Dielectric materials; Laser ablation; Microstructure; Nanostructured materials; Optical device fabrication; Optical materials; Optical pulses; Polymers; Surface emitting lasers; Ultrafast optics; Femtosecond lasers; material processing; three-dimensional (3-D) nanostructuring;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2004.834189

Filename

1366347