The Inductance Enhancement Study of Spiral Inductor Using Ni–AAO Nanocomposite Core

Author

Hsu, M.C. ; Chao, T.Y. ; Cheng, Y.T. ; Liu, C.M. ; Chen, C.

Author_Institution

Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu

Volume

8

Issue

3

fYear

2009

fDate

5/1/2009 12:00:00 AM

Firstpage

281

Lastpage

285

Abstract

The letter presents the fabrication and characterization of on-chip spiral inductors with Ni-anodic alumina oxide (Ni-AAO) nanocomposite core. Ni nanorods with 70 nm diameter are deposited and isolated in an AAO matrix to form a layer of nanocomposite on silicon substrate. About 3% inductance enhancement to the inductor with the nanocomposite core has been observed and the enhancement can be kept up more than 6 GHz. Because the proposed inductance enhancement scheme using ferromagnetic-AAO-based nanocomposite as inductor core employs a CMOS-compatible fabrication process with the characteristics that can be further improved, it is our belief that the scheme has a great potential application for future radio frequency integrated circuitry (RFIC) manufacture.

Keywords

CMOS integrated circuits; aluminium compounds; cores; ferromagnetic materials; inductors; nanocomposites; nickel; radiofrequency integrated circuits; CMOS-compatible fabrication process; Ni-Al₂O₃; ferromagnetic-AAO-based nanocomposite; nanorods; nickel-anodic alumina oxide nanocomposite core; on-chip spiral inductors; radio frequency integrated circuitry manufacture; silicon substrate; size 70 nm; Anodic alumina oxide (AAO); Ni nanorods; Ni–anodic alumina oxide (Ni–AAO) nanocomposite core; inductance; magnetic resonance; quality ($Q$ ) factor; spiral inductor;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2009.2015758

Filename

4796318