DocumentCode :
1181775
Title :
A Planar CMOS Field-Emission Vacuum Magnetic Sensor
Author :
French, Paul J. ; Kenyon, Anthony J. ; Garner, David M.
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. Coll. London, London
Volume :
56
Issue :
4
fYear :
2009
fDate :
4/1/2009 12:00:00 AM
Firstpage :
692
Lastpage :
695
Abstract :
We have fabricated a CMOS vacuum magnetic sensor that exploits the deflection of an electron beam produced by field emission by a perpendicular magnetic field. The device is planar and fabricated by conventional lithography and etching processes. An extremely high magnetic field sensitivity of 4times103%/T is reported.
Keywords :
CMOS integrated circuits; etching; field emission; lithography; magnetic sensors; vacuum microelectronics; electron beam deflection; etching; lithography; magnetic field sensitivity; planar CMOS field-emission vacuum magnetic sensor; Anodes; Colossal magnetoresistance; Electron beams; Lithography; Magnetic field measurement; Magnetic fields; Magnetic noise; Magnetic sensors; Superconducting device noise; Voice mail; CMOS; field emission; magnetic sensing;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2009.2014430
Filename :
4796330
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1181775
بازگشت