Short wavelength coplanar waveguide employing PAGS on silicon substrate for application to miniaturised passive components on RFIC

A short wavelength coplanar waveguide employing a periodically arrayed grounded-strip structure on a silicon substrate was developed for application to miniaturised passive components on a silicon substrate. Using the coplanar waveguide, a highly miniaturised impedance transformer was realised on a silicon substrate. The impedance transformer exhibited good RF performances from 1 to 40 GHz, and its size was 0.01 mm², which is 6.99% of a conventional one.