A novel method to fabricate AlN-Al2O3 multiphase ceramic layer on WCu alloy

Author

Jiandong Zhu ; Rong An ; Chunqing Wang ; Yanhong Tian ; Guangwu Wen

Author_Institution

State Key Lab. of Adv. Welding & Joining, Harbin Inst. of Technol., Harbin, China

fYear

2014

fDate

12-15 Aug. 2014

Firstpage

155

Lastpage

158

Abstract

A novel approach for the fabrication of α-Al₂O₃, mullite (Al₆Si₂O₁₃) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material ratio were mainly studied in this paper which greatly affected the formation of ceramic layers. At last, the interfacial reaction was also discussed between ceramic layer and WCu substrate.

Keywords

alumina; ball milling; ceramics; composite materials; copper alloys; polymers; raw materials; silicon compounds; sintering; slurries; tungsten alloys; Al₆Si₂O₁₃; AlN-Al₂O₃; WCu; ball milling; composite slurry mixing; interfacial reaction; mullite ceramic layer; multiphase ceramic layer fabrication; polycarbosilane; raw material ratio; sintering process parameters; water vapor content; Ceramics; III-V semiconductor materials; Metals; Nitrogen; Substrates; Thermal conductivity; PCS/AlN composite slurry; mullite; multiphase ceramic layer; power semiconductor;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Packaging Technology (ICEPT), 2014 15th International Conference on

Conference_Location

Chengdu

Type

conf

DOI

10.1109/ICEPT.2014.6922626

Filename

6922626