Title :
A novel method to fabricate AlN-Al2O3 multiphase ceramic layer on WCu alloy
Author :
Jiandong Zhu ; Rong An ; Chunqing Wang ; Yanhong Tian ; Guangwu Wen
Author_Institution :
State Key Lab. of Adv. Welding & Joining, Harbin Inst. of Technol., Harbin, China
Abstract :
A novel approach for the fabrication of α-Al2O3, mullite (Al6Si2O13) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material ratio were mainly studied in this paper which greatly affected the formation of ceramic layers. At last, the interfacial reaction was also discussed between ceramic layer and WCu substrate.
Keywords :
alumina; ball milling; ceramics; composite materials; copper alloys; polymers; raw materials; silicon compounds; sintering; slurries; tungsten alloys; Al6Si2O13; AlN-Al2O3; WCu; ball milling; composite slurry mixing; interfacial reaction; mullite ceramic layer; multiphase ceramic layer fabrication; polycarbosilane; raw material ratio; sintering process parameters; water vapor content; Ceramics; III-V semiconductor materials; Metals; Nitrogen; Substrates; Thermal conductivity; PCS/AlN composite slurry; mullite; multiphase ceramic layer; power semiconductor;
Conference_Titel :
Electronic Packaging Technology (ICEPT), 2014 15th International Conference on
Conference_Location :
Chengdu
DOI :
10.1109/ICEPT.2014.6922626
