Author :
Teo, K.B.K. ; Lacerda, R.G. ; Yang, M.H. ; Teh, A.S. ; Robinson, L.A.W. ; Dalal, S.H. ; Rupesinghe, N.L. ; Chhowalla, M. ; Lee, S.-B. ; Jefferson, D.A. ; Hasko, D.G. ; Amaratunga, G.A.J. ; Milne, W.L. ; Legagneux, P. ; Gangloff, L. ; Minoux, E. ; Schnell,
Abstract :
The authors demonstrate the fabrication of solid state and vacuum electronic devices using carbon nanotubes as the active channel and emitters. Single wall and multiwall carbon nanotubes (CNT) are deposited directly on substrates using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD), respectively. The fabrication of top gate and side gate field effect transistors is demonstrated using single wall CNTs. Vertically aligned multiwall CNTs are used to fabricate field emitter arrays or micro-gated field emitters, which have potential application in field emission displays, microwave amplifiers or electron guns.
Keywords :
carbon nanotubes; electron guns; field effect transistors; field emission displays; field emitter arrays; microwave amplifiers; plasma CVD; semiconductor devices; thin film devices; vacuum microelectronics; active channel; carbon nanotube technology; electron guns; electronic device; field effect transistors; field emission displays; field emitter arrays; microgated field emitters; microwave amplifiers; multiwall carbon nanotubes; plasma enhanced chemical vapour deposition; single wall carbon nanotubes; solid state electronics; vacuum electronics;
