Title :
Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal–Oxide Nanostructures and Nanoarchitectures
Author :
Mariotti, D. ; Bose, A.C. ; Ostrikov, K.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
fDate :
6/1/2009 12:00:00 AM
Abstract :
In this paper, we report on the fabrication of Mo-oxide nanostructures and nanoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of the process are important characteristics for nanomanufacturing, and AMPs offer such advantages. In addition, AMPs have shown the ability of promoting self-organization of nanostructures.
Keywords :
molybdenum compounds; nanostructured materials; nanotechnology; plasma materials processing; Mo-oxide nanostructures; MoO; atmospheric-microplasma-assisted nanofabrication; flexibility; metal nanostructure; metal-oxide nanostructure; nanoarchitectures; nanomanufacturing; self-organization; Atmospheric-pressure plasmas; Nanofabrication; Nanostructured materials; Nanostructures; Plasma applications; Plasma confinement; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Atmospheric microplasma (AMP); metal–oxide; molybdenum; nanofabrication; nanomanufacturing;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2009.2014067
