Title :
Integration of InAlGaAs/InGaAs MODFETs on MQW modulators on GaAs substrates
Author :
Fan, C. ; Hansen, M.W. ; Esener, S.C. ; Wieder, H.H.
fDate :
9/29/1994 12:00:00 AM
Abstract :
An InxAlyGa1-x-y device layer structure that enables the monolithic integration of In0.25Al 0.75As/In0.15Ga0.85As MODFETs and In 0.25Al0.35Ga0.40As/In0.25Ga 0.75As MQW modulators is reported. Current gain cutoff frequencies of 10 GHz are measured for 1 μm gate length MODFETs. MQW modulators operating at 1.05 μm demonstrate 20% transmission modulation for an applied 8 V
Keywords :
III-V semiconductors; aluminium compounds; electro-optical devices; gallium arsenide; high electron mobility transistors; indium compounds; integrated optoelectronics; optical modulation; semiconductor quantum wells; 1 micron; 1.05 micron; 10 GHz; 8 V; GaAs; GaAs substrates; In0.25Al0.35Ga0.40As -In0.25Ga0.75As; In0.25Al0.75As-In0.15Ga0.85 As; InAlGaAs/InGaAs MODFETs; MQW modulators; current gain cutoff frequencies; layer structure; monolithic integration; transmission modulation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19941128