Comparison of wavelength splitting for selectively oxidized, ion implanted, and hybrid vertical-cavity surface-emitting lasers

The wavelength splitting between the LP₀₁ and LP₁₁ modes of selectively oxidized, ion implanted, and hybrid ion implanted/selectively oxidized vertical-cavity surface-emitting lasers is studied by experiment and theory. Measured splittings at threshold show marked differences between the different laser structures due to the effects of index guiding and thermal lensing. Theoretical results were obtained using a vector optical mode solver and show good agreement with experimental results. The hybrid lasers exhibited behavior intermediate between the ion implanted and selectively oxidized lasers and could be optimized for high power single transverse mode emission.