DocumentCode
1185533
Title
Silicon micromachining for micro-replication technologies
Author
Klein, Reinhard ; Neyer, A.
Author_Institution
Lehrstuhl fur Hochfrequenztech., Dortmund Univ.
Volume
30
Issue
20
fYear
1994
fDate
9/29/1994 12:00:00 AM
Firstpage
1672
Lastpage
1674
Abstract
Silicon micromachining is applied to the fabrication of highly precise mould inserts to be used in the micro-replication of polymer waveguide components with integrated fibre alignment grooves. The waveguide structures with rectangular cross-section are realised by an anisotropic RIE process, whereas the integrated passive fibre alignment grooves are formed by anisotropic wet chemical etching. Two processes (a two-mask process and a selfaligned one-mask process) are described for the accurate alignment of waveguide structures and fibre alignment grooves
Keywords
etching; integrated optics; machining; optical fibre fabrication; optical polymers; optical waveguide components; optical workshop techniques; silicon; sputtering; Si; anisotropic RIE; anisotropic wet chemical etching; fabrication; integrated passive fibre alignment grooves; micro-replication technologies; mould inserts; polymer waveguide components; rectangular cross-section; selfaligned one-mask process; silicon micromachining; two-mask process;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19941121
Filename
328485
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