Title :
Fundamentals of microfabrication, the science of miniaturization, 2nd edition [Book Review]
Keywords :
Additives; Biological materials; Biomedical engineering; Book reviews; Cyclic redundancy check; Engineering in medicine and biology; Lithography; Micromachining; Power engineering and energy; Sensor systems;
Journal_Title :
Engineering in Medicine and Biology Magazine, IEEE
DOI :
10.1109/MEMB.2003.1195708
