Title :
Improving floating-gate memory reliability by nanocrystal storage and pulsed tunnel programming
Author :
Puzzilli, Giuseppina ; Caputo, Domenico ; Irrera, Fernanda ; Compagnoni, Christian Monzio ; Ielmini, Daniele ; Spinelli, Alessandro S. ; Lacaita, Andrea L. ; Gerardi, Cosimo
Author_Institution :
Dept. of Electron. Eng., Univ. La Sapienza, Rome, Italy
Abstract :
Nanocrystal memories have attracted considerable attentions in the last few years as one of the simplest evolution of the standard Flash technology allowing for improved reliability and scaling perspectives. The possibility for a significant thickness reduction for the oxides insulating the floating-gate layer in the memory cell is assured by the discrete storage effect, limiting the impact of stress-induced leakage current on data retention. In this paper we show at the array level that large improvements in anomalous cell occurrence after cycling is encountered for nanocrystal memories with thin tunnel oxide. Further improvements in array reliability is observed adopting a fast pulsed programming, limiting the defect generation rate by a proper definition of the programming waveform.
Keywords :
cellular arrays; integrated circuit reliability; integrated memory circuits; leakage currents; nanostructured materials; tunnelling; anomalous cell occurrence; array reliability; defect generation rate; fast pulsed programming; floating-gate memory reliability; leakage currents; nanocrystal memories; nanocrystal storage; programming waveform; pulsed tunnel programming; semiconductor memories; thin tunnel oxide; tunneling; Dielectric substrates; Genetic programming; Insulation; Leakage current; Nanocrystals; Nonvolatile memory; Pulse measurements; Silicon on insulator technology; Tunneling; Voltage;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2004.837122