Title :
A drain avalanche hot carrier lifetime model for n- and p-channel MOSFETs
Author :
Koike, Norio ; Tatsuuma, Kenichiro
Author_Institution :
ULSI Process Technol. Dev. Center, Semicond. Co., Kyoto, Japan
Abstract :
A simple and physical drain avalanche hot carrier lifetime model has been proposed. The model is based on a mechanism of interface trap generation caused by recombination of hot electrons and hot holes. The lifetime is modeled as τ(Id/W)2∝(Isub/Id)-m. The formula is different from the conventional τId/W-Isub/Id model in that the exponent of Id/W is 2, which results from the assumed mechanism of the two-carrier recombination. It is shown that the mechanism gives a physical basis of the empirical τ-Isub/W model for NMOSFETs. The proposed model has been validated experimentally both for NMOSFETs and for PMOSFETs. Model parameters extracted from experimental data show that carrier critical energies for creating damage are lower than the interface potential barriers. It is supposed that oxide band edge tailing enables low-energy carriers to create the damage. The channel hot electron condition becomes the worst case in short channel NMOSFETs, because gate voltage dependence of the maximum channel electric field decreases.
Keywords :
MOSFET; electron traps; electron-hole recombination; hot carriers; semiconductor device models; semiconductor device reliability; NMOSFET; PMOSFET; channel electric field; channel hot electron condition; critical energies; drain avalanche hot carrier lifetime model; electron-hole recombination; gate voltage dependence; interface potential barriers; interface trap generation; low-energy carriers; oxide band edge tailing; reliability modeling; semiconductor device reliability; two-carrier recombination; Degradation; Drain avalanche hot carrier injection; Electron traps; Hot carriers; Integrated circuit reliability; MOSFETs; Radiative recombination; Semiconductor device reliability; Spontaneous emission; Voltage;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2004.831992