Fabrication of High-Q Microresonators Using Femtosecond Laser Micromachining

Author

Tada, Kazuki ; Cohoon, G.A. ; Kieu, Khan ; Mansuripur, Masud ; Norwood, Robert A.

Author_Institution

Coll. of Opt. Sci., Univ. of Arizona, Tucson, AZ, USA

Volume

25

Issue

5

fYear

2013

fDate

1-Mar-13

Firstpage

430

Lastpage

433

Abstract

We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2×10⁶. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

Keywords

Q-factor; heat transfer; high-speed optical techniques; laser ablation; laser beam machining; micro-optomechanical devices; microcavities; micromachining; micromechanical resonators; optical fabrication; optical resonators; whispering gallery modes; femtosecond laser micromachining; heat reflow process; high-Q-factor microresonators; material nonthermal laser ablation; optical fabrication; optical quality; whispering gallery mode microdisk resonators; Laser beams; Microcavities; Optical device fabrication; Q factor; Ultrafast optics; Femtosecond laser micromachining; microresonator fabrication; whispering gallery mode microresonators;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2013.2240382

Filename

6412717