• DocumentCode
    1190203
  • Title

    Thle monopole-a new instrument for measuring partial pressures

  • Author

    Hudson, J.B. ; Watters, R.L.

  • Volume
    15
  • Issue
    3
  • fYear
    1966
  • Firstpage
    94
  • Lastpage
    98
  • Abstract
    Design parameters appropriate to the construction of a monopole type mass spectrometer suitable for use as an ultra-high vacuum partial pressure analyzer are developed and elaborated. Performance results of an instrument built to these parameters are presented. Results indicate a usable mass range of 300 amu, with unit resolution over the whole range. Ultimate sensitivity is in the 10-14 Torr partial pressure range.
  • Keywords
    Electrodes; Equations; Filters; H infinity control; Instruments; Magnetic analysis; Magnetic separation; Mass spectroscopy; Pressure measurement; Stability;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.1966.4313516
  • Filename
    4313516