• DocumentCode
    1191536
  • Title

    Good news: you can patch active plasma and collisionless sheath

  • Author

    Godyak, Valery ; Sternberg, Natalia

  • Author_Institution
    Osram Sylvania Inc., Beverly, MA, USA
  • Volume
    31
  • Issue
    2
  • fYear
    2003
  • fDate
    4/1/2003 12:00:00 AM
  • Firstpage
    303
  • Abstract
    It is shown that the proof of physical inconsistency of the discrete plasma-sheath model with a continuous electric field is based on mathematical error in solving the basic sheath equation.
  • Keywords
    plasma boundary layers; plasma sheaths; plasma theory; DC discharges; RF discharges; active plasma; asymptotic plasma; boundary condition; bounded plasma-sheath systems; collisionless sheath; continuous electric field; discrete plasma-sheath hydrodynamic model; disjunction; electrode phenomena; electron densities; electrostatic plasma probes; ion densities; physical inconsistency; plasma boundary; plasma sheath; plasma-sheath edge; plasma-sheath interface; quasi-neutral plasma; sheath equation; singularity; Boundary conditions; Discharges; Electrostatics; Equations; Mathematical model; Plasma applications; Plasma density; Plasma properties; Plasma sheaths; Plasma temperature;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2003.809282
  • Filename
    1197352