• DocumentCode
    119168
  • Title

    Reactively sputtered PMN-PT thin films for electrocaloric applications

  • Author

    Kleiner, Alexander ; Suchaneck, G. ; Eydam, A. ; Gerlach, G. ; Liu, L.

  • Author_Institution
    Solid State Electron. Lab., Tech. Univ. Dresden, Dresden, Germany
  • fYear
    2014
  • fDate
    12-16 May 2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this work, lead magnesium niobate-lead titanate (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3(PMN-PT) thin films with PT-fractions of 6.5 to 20% were fabricated on Pt(111)-coated Si wafers for the first time by multitarget reactive sputtering using four metallic targets (Pb, Mg, Nb, Ti).
  • Keywords
    ferroelectric thin films; lead compounds; magnesium compounds; pyroelectricity; sputter deposition; PMN-PT thin films; Pb(Mg0.33Nb0.66)O3-PbTiO3; Pt(111)-coated Si wafer substrates; Pt-Si; electrocaloric application; lead magnesium niobate-lead titanate thin films; multitarget reactive sputtering; Crystals; Dielectrics; Electric fields; Films; Niobium; Sputtering; Temperature; PMN-PT; multi-target reactive sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM), 2014 Joint IEEE International Symposium on the
  • Conference_Location
    State College, PA
  • Type

    conf

  • DOI
    10.1109/ISAF.2014.6922988
  • Filename
    6922988
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=119168