Development of FeCo-based thin films for gigahertz applications

Author

Yu, Eunji ; Shim, Jong Sik ; Kim, Inyoung ; Kim, Jongryoul ; Han, Suk Hee ; Kim, Hi Jung ; Kim, Ki Hyeon ; Yamaguchi, Masahiro

Author_Institution

Dept. of Metall. & Mater. Sci., Hanyang Univ., Ansan, South Korea

Volume

41

Issue

10

fYear

2005

Firstpage

3259

Lastpage

3261

Abstract

For improving high-frequency characteristics and soft magnetic properties of (Fe₇Co₃)B-based thin films, the effects of Ni addition and an oblique deposition method on the microstructures have been examined. The Ni addition to (Fe₇Co₃)B films was found to enhance B segregation on grain boundaries, which resulted in the formation of a well-defined columnar structure and the increase of film resistivity. Utilizing the columnar structure, large in-plane anisotropy was induced by an oblique deposition method which enabled the control of the inclination angle of the columns. As a result, the ferromagnetic resonance of (Fe₇Co₃)₇₁Ni₇B₂₂ thin films reached 6.2GHz.

Keywords

ferromagnetic resonance; grain boundaries; induced anisotropy (magnetic); iron alloys; magnetic thin films; nickel; segregation; soft magnetic materials; sputter deposition; B segregation; FeCo; Ni; columnar structure; ferromagnetic resonance; film resistivity; grain boundary; high-frequency characteristic; large in-plane anisotropy; microstructural analysis; oblique deposition method; soft magnetic property; soft magnetic thin film; Anisotropic magnetoresistance; Conductivity; Grain boundaries; Iron; Magnetic films; Magnetic properties; Magnetic resonance; Microstructure; Sputtering; Transistors; High-frequency characteristics; microstructural analysis; oblique deposition method; soft magnetic thin film;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2005.854667

Filename

1519272