DocumentCode
1191945
Title
Micromachined bridge-shaped spiral inductor on anodised aluminium substrate
Author
Kim, K.-M. ; Kim, Jung-Ho ; Kwon, Young-shin
Author_Institution
Wavenics, Inc., Daejeon
Volume
45
Issue
6
fYear
2009
Firstpage
311
Lastpage
313
Abstract
Noble micromachined integrated spiral inductors on anodised aluminium substrate are presented. The RF characteristics of the fabricated inductors have been measured. A high peak Q-factor of 82.36 at 4.2 GHz has been achieved with inductance of 2.59 nH (at 2 GHz) and a self-resonant frequency of around 10 GHz. This work demonstrates that an integrated passive device on anodised aluminium substrate has a competitive RF performance compared to that of LTCC technology.
Keywords
inductors; micromachining; anodised aluminium substrate; fabricated inductors; micromachined bridge-shaped spiral inductor; micromachined integrated spiral inductors; self-resonant frequency;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2009.3744
Filename
4800385
Link To Document