Title :
Pressure and temperature microsensor based on surface acoustic wave
Author :
Li, T.-L. ; Wu, Zhisheng ; Hu, Haibo ; Zheng, Lei
Author_Institution :
Shenzhen Grad. Sch., Univ. Town of Shenzhen, Shenzhen
Abstract :
A novel microsensor based on a surface acoustic wave is reported, which is to measure pressure and temperature simultaneously. The kernel structure and design theory of this sensor with a single sensing unit are introduced. The excellent agreement between the pressure and temperature results measured by the sensor and the direct measurement data is presented.
Keywords :
microsensors; pressure sensors; surface acoustic wave sensors; temperature sensors; design theory; kernel structure; pressure microsensor; surface acoustic wave sensor; temperature microsensor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2009.3129
