Title :
Cryogenic Microwave Cavity for Semiconductor Diagnostics
Author :
Brodwin, Morris E. ; Lu, Pao-Sun
Abstract :
A replaceable wall microwave cavity for semiconductor diagnostics is described for operation at cryogenic temperatures. A method of temperature compensation of resonant frequency is developed to minimize the frequency deviation due to thermal contraction of the cavity body. The anomalous skin effect at low temperatures is observed and taken into consideration.
Keywords :
Copper; Cryogenics; Magnetic field measurement; Resonant frequency; Skin effect; Tail; Temperature; Thermal conductivity; Thermal expansion; Wire;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1969.4313802
