Title :
Guest editorial optical MEMS and its future trends
Author :
Lin, Lih Y. ; Wu, Ming C. ; Sawada, Renshi ; Mohr, J.A.
Author_Institution :
University of California
fDate :
3/1/2003 12:00:00 AM
Keywords :
Art; Biomedical optical imaging; Communication industry; Displays; Fabrication; Integrated optics; Lasers and Electro-Optics Society; Micromechanical devices; Optical sensors; Research and development;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2003.810734
