DocumentCode
1193513
Title
Piezoelectric ultrasonic micromotor with 1.5 mm diameter
Author
Dong, Shuxiang ; Lim, Siak P. ; Lee, Kwork H. ; Zhang, Jingdong ; Lim, Leong C. ; Uchino, Kenji
Author_Institution
Mater. Res. Inst., Pennsylvania State Univ., University Park, PA, USA
Volume
50
Issue
4
fYear
2003
fDate
4/1/2003 12:00:00 AM
Firstpage
361
Lastpage
367
Abstract
A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (/spl sim/70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 /spl mu/N-m, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.
Keywords
bending; lead compounds; micromotors; stators; torque; ultrasonic motors; vibrations; 1.5 mm; 7 mm; 70 kHz; PZT; PZT ceramic/metal composite tube stator; PbZrO3TiO3; bending vibration mode; piezoelectric ultrasonic micromotor; torque; Ceramics; Microactuators; Micromotors; Piezoelectric films; Rotors; Silicon; Stability; Stators; Titanium compounds; Torque;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2003.1197958
Filename
1197958
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