Title :
Demonstration of Hybrid Alx Ga1−xAs–Polysilicon Microelectromechanical Tunable Filter
Author :
Ochoa, Edward ; Nelson, Thomas ; Bedford, Robert ; Ehret, James ; Starman, LaVern ; Harvey, Michael ; Anderson, Travis ; Ren, Fan
Author_Institution :
Air Force Res. Lab. Sensors Directorate, Wright Patterson AFB, OH
fDate :
3/15/2007 12:00:00 AM
Abstract :
We report the experimental demonstration of a hybrid AlxGa1-xAs-polysilicon electrostatically actuated microelectromechanical systems (MEMS) tunable filter. An Al0.4Ga0.6As-GaAs distributed Bragg reflector was successfully flip-bonded to a polysilicon MEMS platform using SU-8 photoresist as bonding adhesive. The device demonstrated 53 nm (936.5-989.5 nm) of resonant wavelength tuning over the electrostatic actuation voltage range of 0-10 V
Keywords :
III-V semiconductors; adhesive bonding; aluminium compounds; distributed Bragg reflectors; electrostatic actuators; elemental semiconductors; gallium arsenide; integrated optics; micro-optomechanical devices; optical filters; optical tuning; photoresists; silicon; 0 to 10 V; 936.5 to 989.5 nm; Al0.4Ga0.6As-GaAs distributed Bragg reflector; AlxGa1-xAs-Si; SU-8 photoresist; bonding adhesive; electrostatic actuation; flip bonding; hybrid AlxGa1-xAs-polysilicon filter; microelectromechanical filter; microelectromechanical systems; polysilicon MEMS platform; resonant wavelength tuning; tunable filter; Force sensors; Laser tuning; Micromechanical devices; Optical filters; Optical materials; Optical tuning; Semiconductor laser arrays; Tunable circuits and devices; Vertical cavity surface emitting lasers; Wavelength division multiplexing; Flip-bonding; SU-8; flip-chip devices; microelectromechanical devices; optical filters; passive filters; tunable filters (TFs); wavelength-division-multiplexing (WDM) microelectromechanical systems (MEMS) filter;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2007.891942
