Title :
Planarized thin film inductors and capacitors for hybrid integrated circuits made of aluminum and anodic alumina
Author :
Surganov, Victor
Author_Institution :
Dept. of Microelectron., Minsk Radio Eng. Inst., Byelorussia
fDate :
5/1/1994 12:00:00 AM
Abstract :
Planarized inductors and capacitors made of aluminum layers by electrochemical anodization technique have been tested in the frequency region of 1 kHz-300 MHz at temperatures of 293-473 K. These microcomponents can be used for high-frequency hybrid integrated circuits
Keywords :
alumina; aluminium; anodisation; electrolytic capacitors; hybrid integrated circuits; inductors; thin film capacitors; thin film circuits; 1 kHz to 300 MHz; 293 to 473 K; Al; Al2O3; anodic alumina; electrochemical anodization technique; high-frequency hybrid IC; hybrid integrated circuits; microcomponents; planarized components; thin film capacitors; thin film inductors; Aluminum; Capacitors; Dielectric substrates; Dielectric thin films; Frequency; Hybrid integrated circuits; Inductance; Magnetic separation; Thin film circuits; Thin film inductors;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
