• DocumentCode
    1194050
  • Title

    Guest editorial special section on single-wafer manufacturing in the nanochip era

  • Author

    Singh, Rajdeep ; Chih-Yuan Lu ; Koike, Atsushi ; Thompson, Mark ; Thakur, R.P.S.

  • Author_Institution
    Clemson University
  • Volume
    16
  • Issue
    2
  • fYear
    2003
  • fDate
    5/1/2003 12:00:00 AM
  • Firstpage
    90
  • Lastpage
    95
  • Keywords
    Costs; Electronic equipment manufacture; Electronics industry; Environmental economics; Integrated circuit technology; Manufacturing; Marketing and sales; Semiconductor device manufacture; Silicon germanium; Silicon on insulator technology;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2003.810921
  • Filename
    1198014
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1194050