DocumentCode :
1194111
Title :
Oxygen Effects on a \\hbox {He/O}_{2} Plasma Jet at Atmospheric Pressure
Author :
Wang, Shouguo ; Wan, Jun
Author_Institution :
Inst. of Microelectron., Chinese Acad. of Sci., Beijing
Volume :
37
Issue :
4
fYear :
2009
fDate :
4/1/2009 12:00:00 AM
Firstpage :
551
Lastpage :
554
Abstract :
A plasma jet has been developed that operates using RF power and produces a stable homogeneous discharge of He/O2 at atmospheric pressure. An optical emission spectroscopy technique was used to observe the electronically excited species at the point 10 mm downstream from the nozzle generated by the He/O2 plasma jet, and the discharge characteristics for the gas mixture of He/O2 were studied with a current probe and a voltage probe. The results indicate that there is a relative optimum fraction of O2 in the He/O2 gas mixture from 0.5% to 1.5% for the relative larger intensity of the characteristic atomic oxygen line at 777 nm, the root-mean-square (rms) current and rms voltage of the discharge are also more sensitive to oxygen content than to total gas flow.
Keywords :
discharges (electric); helium; nozzles; oxygen; plasma diagnostics; plasma jets; plasma probes; He-O2; RF power; atmospheric pressure; current probe; electronically excited species; gas mixture; nozzle; optical emission spectroscopy; oxygen Effects; plasma jet; pressure 1 atm; stable homogeneous discharge; total gas flow; voltage probe; wavelength 777 nm; Atmospheric pressure; discharge characteristics; oxygen effect; plasma jet;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2009.2012861
Filename :
4801628
Link To Document :
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