DocumentCode
1194157
Title
Guest editorial ICMTS 2002
Author
Walton, A.J. ; Mathewson, A. ; McCarthy, K.G.
Author_Institution
University of Edinburgh
Volume
16
Issue
2
fYear
2003
fDate
5/1/2003 12:00:00 AM
Firstpage
179
Lastpage
180
Keywords
Application software; Circuit testing; Computer aided manufacturing; Fabrication; Materials reliability; Materials testing; Microelectronics; Pulse measurements; Semiconductor device manufacture; Sliding mode control;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2003.811898
Filename
1198025
Link To Document