Measurements of vacuum arc ion charge-state distributions

Author

Brown, Ian G. ; Galvin, J.E.

Author_Institution

Lawrence Berkeley Lab., California Univ., Berkeley, CA, USA

Volume

17

Issue

5

fYear

1989

fDate

10/1/1989 12:00:00 AM

Firstpage

679

Lastpage

682

Abstract

The charge-state distribution of ions generated in the metal vapor vacuum arc under a wide range of experimental conditions was measured. The experiments were carried out using an ion source in which the metal vapor vacuum arc is used as the method of plasma production and by which a high-quality, high-current beam of metal ions is produced. Charge-state spectra were measured using a time-of-flight diagnostic; arc voltages were also measured. Parameters that were varied include cathode material, arc current, axial magnetic field strength, neutral gas pressure, and arc geometry

Keywords

arcs (electric); plasma diagnostics; arc current; arc geometry; axial magnetic field strength; cathode material; charge state spectra; high-current beam; ion source; metal ions; metal vapor; neutral gas pressure; plasma production; time-of-flight diagnostic; vacuum arc ion charge-state distributions; Current measurement; Ion sources; Magnetic field measurement; Magnetic materials; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma sources; Production; Vacuum arcs;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.41181

Filename

41181