DocumentCode
1197792
Title
A Tabletop UV Microscope
Author
Minkel, J.R.
Volume
43
Issue
9
fYear
2006
Firstpage
16
Lastpage
16
Abstract
Researchers from the Colorado State University and Lawrence Berkeley National Laboratory´s Center for X-ray Optics have developed a high-resolution ultraviolet microscope that fits on a tabletop. Researchers were able to get enough resolving power from a relatively small setup by providing a better alignment of the titanium-sapphire laser, the silver-cadmium pellet, and the diffraction plates. These tabletop UV lasers have the potential to serve as candidate inspection systems for future lithographic masks
Keywords
lithography; optical microscopes; Colorado State University; Lawrence Berkeley National Laboratory Center; X-ray Optics; high-resolution ultraviolet microscope; inspection systems; lithographic masks; silver-cadmium pellet; tabletop UV microscope; titanium-sapphire laser; DVD; Erbium; Eyes; High definition video; Microscopy; Motion pictures; Optimized production technology; Protection; Testing; Video recording;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.2006.1688249
Filename
1688249
Link To Document