• DocumentCode
    1197792
  • Title

    A Tabletop UV Microscope

  • Author

    Minkel, J.R.

  • Volume
    43
  • Issue
    9
  • fYear
    2006
  • Firstpage
    16
  • Lastpage
    16
  • Abstract
    Researchers from the Colorado State University and Lawrence Berkeley National Laboratory´s Center for X-ray Optics have developed a high-resolution ultraviolet microscope that fits on a tabletop. Researchers were able to get enough resolving power from a relatively small setup by providing a better alignment of the titanium-sapphire laser, the silver-cadmium pellet, and the diffraction plates. These tabletop UV lasers have the potential to serve as candidate inspection systems for future lithographic masks
  • Keywords
    lithography; optical microscopes; Colorado State University; Lawrence Berkeley National Laboratory Center; X-ray Optics; high-resolution ultraviolet microscope; inspection systems; lithographic masks; silver-cadmium pellet; tabletop UV microscope; titanium-sapphire laser; DVD; Erbium; Eyes; High definition video; Microscopy; Motion pictures; Optimized production technology; Protection; Testing; Video recording;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2006.1688249
  • Filename
    1688249