Effects of nitrogen content on the microstructure and magnetic properties of FeTaN films

Author

Lin, Jiang-Ching ; Chen, Lih-Juann ; Chen, Chi-Jen

Author_Institution

Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan

Volume

30

Issue

6

fYear

1994

fDate

11/1/1994 12:00:00 AM

Firstpage

3912

Lastpage

3914

Abstract

Microstructures and soft magnetic properties of FeTaN films with various nitrogen contents have been investigated. When the nitrogen flow ratio of sputtering gas is low, characteristics of low permeability and high coercivity are ascribed to the abnormal grain growth of a α-Fe. On the other hand, the formation of a ε-Fe_2-3N phase due to the presence of higher nitrogen content also caused deterioration of soft magnetic properties. A permeability value higher than 7500 was obtained for films with homogeneous microstructure and appropriate crystal size by critical control of nitrogen content

Keywords

coercive force; crystal microstructure; ferromagnetic materials; iron alloys; magnetic flux; magnetic heads; magnetic permeability; magnetic thin film devices; magnetic thin films; soft magnetic materials; sputter deposition; tantalum alloys; FeTaN; FeTaN films; coercivity; crystal size; flux density; homogeneous microstructure; magnetic recording heads; magnetic thin films; nitrogen flow ratio; permeability; soft magnetic properties; sputtering gas; Annealing; Coercive force; Magnetic films; Magnetic materials; Magnetic properties; Microstructure; Nitrogen; Permeability; Soft magnetic materials; Sputtering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.333941

Filename

333941