Title :
Sputter-induced random micro texturing on NiP plated aluminium and alternate substrates
Author :
Teng, Edward ; Nguyen, Phuong ; Eltoukhy, Atef
Author_Institution :
StorMedia Inc., Santa Clara, CA, USA
fDate :
11/1/1994 12:00:00 AM
Abstract :
Random micro texturing can be developed on both NiP/Al and alternate substrate disks by sputtering nonwetting and seed layers. The nonwetting layer was first sputtered on the substrate, then the seed layer, chrome underlayer, CoCrPtTa magnetic layer and carbon overcoat were sequentially deposited on top of the nonwetting layer. The seed layer melting point, film thickness, substrate surface energy, and temperature were found to be key parameters affecting the properties and characteristics of sputter-induced micro texturing (SIMT). The surface topography and roughness of micro texturing were characterized using SEM, Atomic Force Microscope (AFM), and glide height avalanche tests. Tribology tests were conducted using 1 RPM stiction test and a CSS test on disk drives equipped with semiconductor strain gauges. By carefully controlling process parameters, the number of texturing summits at the desired threshold level can be increased significantly without changing the surface roughness as measured by optical interferometry. Consequently, disk stiction can be greatly improved without deteriorating glide performance
Keywords :
aluminium; atomic force microscopy; magnetic disc storage; magnetic recording; nickel compounds; scanning electron microscopy; sputter deposition; substrates; surface texture; surface topography; tribology; AFM; CSS test; CoCrPtTa magnetic layer; Cr-CoCrPtTa-C; NiP plated aluminium; NiP-Al; SEM; alternate substrate disks; carbon overcoat; chrome underlayer; film thickness; glide height avalanche tests; melting point; nonwetting layer; optical interferometry; random micro texturing; seed layer; sputter-induced micro texturing; stiction test; substrate surface energy; surface roughness; surface topography; temperature; tribology; Aluminum; Atomic force microscopy; Rough surfaces; Scanning electron microscopy; Semiconductor device testing; Sputtering; Substrates; Surface roughness; Surface texture; Surface topography;
Journal_Title :
Magnetics, IEEE Transactions on