Performance of hard DLC protective film prepared by PECVD method for thin film magnetic disk

Author

Iechika, Keigo ; Kokaku, Yuichi ; Ootake, Mitsuyoshi ; Abe, Katsuo ; Tani, Hiroshi ; Inaba, Hiroshi

Author_Institution

Data Storage & Retrieval Syst. Div., Hitachi Ltd., Kanagawa, Japan

Volume

30

Issue

6

fYear

1994

fDate

11/1/1994 12:00:00 AM

Firstpage

4134

Lastpage

4136

Abstract

Performance of a diamondlike carbon (DLC) film prepared by the PECVD method has been investigated as the protective film of a rigid thin film disk. An in-line sputtering PECVD multilayer deposition system was used for preparation of disk samples. The disks were found to be superior to those disks with conventionally sputtered carbon films in many aspects such as high durability against CSS tests, smooth coverage over the irregular points of the magnetic layer, and as a result, good corrosion resistance even at a thickness of 15 nm or less

Keywords

carbon; corrosion; hard discs; magnetic recording; magnetic thin film devices; plasma CVD coatings; protective coatings; wear; 15 nm; C; CSS tests; corrosion resistance; coverage; diamondlike carbon film; durability; hard DLC protective film; in-line sputtering PECVD multilayer deposition; rigid thin film disk; thin film magnetic disk; Amorphous magnetic materials; Argon; Cascading style sheets; Hydrogen; Magnetic films; Magnetic multilayers; Protection; Sputtering; Substrates; Testing;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.334013

Filename

334013