Title :
Performance of hard DLC protective film prepared by PECVD method for thin film magnetic disk
Author :
Iechika, Keigo ; Kokaku, Yuichi ; Ootake, Mitsuyoshi ; Abe, Katsuo ; Tani, Hiroshi ; Inaba, Hiroshi
Author_Institution :
Data Storage & Retrieval Syst. Div., Hitachi Ltd., Kanagawa, Japan
fDate :
11/1/1994 12:00:00 AM
Abstract :
Performance of a diamondlike carbon (DLC) film prepared by the PECVD method has been investigated as the protective film of a rigid thin film disk. An in-line sputtering PECVD multilayer deposition system was used for preparation of disk samples. The disks were found to be superior to those disks with conventionally sputtered carbon films in many aspects such as high durability against CSS tests, smooth coverage over the irregular points of the magnetic layer, and as a result, good corrosion resistance even at a thickness of 15 nm or less
Keywords :
carbon; corrosion; hard discs; magnetic recording; magnetic thin film devices; plasma CVD coatings; protective coatings; wear; 15 nm; C; CSS tests; corrosion resistance; coverage; diamondlike carbon film; durability; hard DLC protective film; in-line sputtering PECVD multilayer deposition; rigid thin film disk; thin film magnetic disk; Amorphous magnetic materials; Argon; Cascading style sheets; Hydrogen; Magnetic films; Magnetic multilayers; Protection; Sputtering; Substrates; Testing;
Journal_Title :
Magnetics, IEEE Transactions on
