Deposition of garnet thin films by metallo-organic decomposition (MOD)

Author

Azevedo, A. ; Bharthulwar, S. ; Eppler, W.R. ; Kryder, M.H.

Author_Institution

Data Storage Syst. Center, Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

30

Issue

6

fYear

1994

fDate

11/1/1994 12:00:00 AM

Firstpage

4416

Lastpage

4418

Abstract

Polycrystalline Dy_1.6Bi_1.4Fe_(5-x)FeGa_xO ₁₂ and Gd₂BiFe_(5-x)Ga_xO₁₂ garnet thin films have been deposited on glass substrates by metallo-organic decomposition. The advantages of this process include low cost and accurate control of composition. The crystalline garnet phase was ascertained by X-ray diffractometry and the composition was measured by X-ray flourescence. The magnetic and magneto-optic properties were characterized using a magneto-optic loop tracer

Keywords

X-ray diffraction; X-ray fluorescence analysis; bismuth compounds; chemical vapour deposition; dysprosium compounds; gadolinium compounds; garnets; magnetic thin films; magneto-optical effects; DyBiGG; DyBiGa5O12; Gd₂BiFe_(5-x)Ga_xO₁₂ garnet thin films; GdBiFe5O12Ga5O12; GdBiIGGG; X-ray diffractometry; X-ray flourescence; composition; crystalline garnet phase; deposition; garnet thin films; glass substrates; low cost; magnetic properties; magneto-optic loop tracer; magneto-optic properties; metallo-organic decomposition; polycrystalline Dy_1.6Bi_1.4Fe_(5-x)FeGa_xO ₁₂; Amorphous magnetic materials; Atomic measurements; Bismuth; Data storage systems; Dielectric substrates; Garnet films; Glass; Optical films; Solvents; Sputtering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.334106

Filename

334106