DocumentCode :
1200132
Title :
An ultra-high resolution single-domain magnetic force microscope tip fabricated using nanolithography
Author :
Chou, Stephen Y. ; Wei, Mark S. ; Fischer, Paul B.
Author_Institution :
Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA
Volume :
30
Issue :
6
fYear :
1994
fDate :
11/1/1994 12:00:00 AM
Firstpage :
4485
Lastpage :
4487
Abstract :
An ultra-high resolution MFM tip is proposed and demonstrated. The tip consists of a ~30 nm thick ferromagnetic film coated on a non-magnetic pillar that has a diameter of 150 nm, a length over 1.5 μm and a sharp end of a 10 nm radius. The pillar was fabricated on the apex of a commercial scanning force microscope tip using electron beam lithography. The ferromagnetic films were coated only on one side of the pillar but not on the rest of the tip. Therefore, the tip has a trough shape and a tapered end with a tip radius of ~10 nm. The ferromagnetic trough is single-domain because of its nanoscale size and shape anisotropy. Compared to conventional Ni wire tips, the new tips have a much smaller magnetic charge distribution at the end of the tip, thus offering better imaging resolution. Furthermore, they have a lower stray field, thus making them well suited to measuring soft magnetic materials
Keywords :
electron beam lithography; ferromagnetic materials; magnetic force microscopy; magnetic thin films; nanotechnology; 1.5 mum; 10 nm; 150 nm; electron beam lithography; ferromagnetic trough; imaging resolution; magnetic charge distribution; nanolithography; nanoscale size; nonmagnetic pillar; shape anisotropy; single-domain; soft magnetic materials; stray field; tapered end; thick ferromagnetic film; trough shape; ultra-high resolution MFM tip; ultra-high resolution single-domain magnetic force microscope tip; Anisotropic magnetoresistance; Electron beams; Lithography; Magnetic films; Magnetic force microscopy; Magnetic forces; Scanning electron microscopy; Shape; Soft magnetic materials; Wire;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.334126
Filename :
334126
Link To Document :
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