DocumentCode
1200602
Title
Silicon micromachined two-dimensional galvano optical scanner
Author
Asada, N. ; Matsuki, H. ; Minami, K. ; Esashi, M.
Author_Institution
Tohoku Gakuin Univ., Sendai, Japan
Volume
30
Issue
6
fYear
1994
fDate
11/1/1994 12:00:00 AM
Firstpage
4647
Lastpage
4649
Abstract
A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil
Keywords
angular measurement; coils; elemental semiconductors; magneto-optical devices; micromachining; optical scanners; semiconductor technology; silicon; Si; Si micromachined optical scanner; driving coil; electromagnetic coupling; fixed detecting coil; micromachined gimbal structure; rotational angle; two-dimensional galvano optical scanner; Coils; Detectors; Electromagnetic forces; Lorentz covariance; Magnets; Micromachining; Mirrors; Optical device fabrication; Optical sensors; Silicon;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.334177
Filename
334177
Link To Document