Title :
Focused-ion-beam fuse cutting for redundancy technology
Author :
Komano, Haruki ; Ohmura, Yamichi ; Takigawa, Tadahiro
Author_Institution :
Toshiba Corp., Kawasaki, Japan
fDate :
7/1/1988 12:00:00 AM
Abstract :
Fuse cutting with focused ion beams to activate redundancy circuits is proposed, and experiments are reported that verify its potential usefulness. Aluminum fuses covered with a thin passivation layer, which are difficult to cut by conventional laser-beam technology due to the material´s high reflectivity, were cut in 5 s. Ga ion beams with 30-kV acceleration voltage, 0.8-μm beam diameter, and 0.3-A/cm 2 current density were used. No change in device properties due to focused-ion-beam irradiation was observed unless the focused ion beams were incident directly on the device. It is concluded that the focused-ion-beam programming technique will be useful for redundancy circuit programming
Keywords :
PLD programming; aluminium; gallium; integrated circuit technology; ion beam applications; redundancy; 30 kV; 5 s; 800 nm; Al fuses; FIB; Ga ion beams; acceleration voltage; activate redundancy circuits; beam diameter; current density; focused ion beams; focused-ion-beam programming technique; fuse cutting; redundancy circuit programming; redundancy technology; thin passivation layer; Acceleration; Aluminum; Circuits; Fuses; Ion beams; Laser beam cutting; Particle beams; Passivation; Reflectivity; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
