• DocumentCode
    1204048
  • Title

    Prolog to Semiconductor Piezoresistance for Microsystems

  • Author

    Donnell, Richard Ó

  • Volume
    97
  • Issue
    3
  • fYear
    2009
  • fDate
    3/1/2009 12:00:00 AM
  • Firstpage
    511
  • Lastpage
    512
  • Abstract
    This is an introduction to the above titled paper.
  • Keywords
    Epitaxial growth; Ion implantation; Piezoelectricity; Piezoresistance; Piezoresistive devices; Substrates; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/JPROC.2008.2011941
  • Filename
    4804785
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1204048