DocumentCode
1204122
Title
Temperature coefficient of SAW frequency in single crystal bulk AlN
Author
Bu, G. ; Ciplys, D. ; Shur, M. ; Schowalter, L.J. ; Schujman, S. ; Gaska, R.
Author_Institution
Dept. of Electr., Rensselaer Polytech. Inst., Troy, NY, USA
Volume
39
Issue
9
fYear
2003
fDate
5/1/2003 12:00:00 AM
Firstpage
755
Lastpage
757
Abstract
The temperature coefficient of frequency (TCF) for surface acoustic waves (SAW) propagating on (0001) bulk AlN single crystal has been measured at 358 MHz in the temperature range 25-70°C. The TCF value -19 ppm/° is in agreement with the value estimated from the temperature coefficients of the AlN elastic constants. This value is considerably smaller than temperature coefficients of many materials currently used for SAW substrates.
Keywords
III-V semiconductors; aluminium compounds; surface acoustic waves; 25 to 70 degC; 358 MHz; AlN; bulk AlN single crystal; elastic constants; surface acoustic wave; temperature coefficient of frequency;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20030488
Filename
1199988
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