Title :
Temperature coefficient of SAW frequency in single crystal bulk AlN
Author :
Bu, G. ; Ciplys, D. ; Shur, M. ; Schowalter, L.J. ; Schujman, S. ; Gaska, R.
Author_Institution :
Dept. of Electr., Rensselaer Polytech. Inst., Troy, NY, USA
fDate :
5/1/2003 12:00:00 AM
Abstract :
The temperature coefficient of frequency (TCF) for surface acoustic waves (SAW) propagating on (0001) bulk AlN single crystal has been measured at 358 MHz in the temperature range 25-70°C. The TCF value -19 ppm/° is in agreement with the value estimated from the temperature coefficients of the AlN elastic constants. This value is considerably smaller than temperature coefficients of many materials currently used for SAW substrates.
Keywords :
III-V semiconductors; aluminium compounds; surface acoustic waves; 25 to 70 degC; 358 MHz; AlN; bulk AlN single crystal; elastic constants; surface acoustic wave; temperature coefficient of frequency;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030488
