Title :
Thin-Film Temperature Sensors for Biological Measurements
Author :
Cain, Clarence P. ; Welch, Ashley J.
Author_Institution :
Eastern Virginia Medical School, Norfolk, Va. 23507.
Abstract :
Dynamic as well as static temperature measurements are now possible in biological tissue using thin-film Cu-Ni microthermocouples. These probes which use a quartz substrate exhibit response times of less than a millisecond with thermal properties similar to tissue. Their thermoelectric EMF of 21 , ¿m V/°C is linearly dependent on temperature over the range normally encountered in biological measurements. Probe-tip diameters as small as 10 ¿m are being fabricated.
Keywords :
Biological tissues; Delay; Probes; Substrates; Temperature dependence; Temperature measurement; Temperature sensors; Thermoelectricity; Thin film sensors; Transistors; Copper; Electric Conductivity; Nickel; Quartz; Thermal Conductivity; Thermometers;
Journal_Title :
Biomedical Engineering, IEEE Transactions on
DOI :
10.1109/TBME.1974.324415
