Title :
RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication
Author :
De Los Santos, H.J. ; Fischer, G. ; Tilmans, H.A.C. ; van Beek, J.T.M.
Author_Institution :
NanoMEMS Res., LLC, Irvine, CA, USA
Abstract :
The aim of this article to expose the impact and status of the application of RF-MEMS switchable capacitors, varactors and switches in the three elements of this paradigm, namely, handsets, base stations, and satellites. In particular, issues such as system-level motivation/justification for RF MEMS, device requirements, high-volume manufacturing, packaging, and state-of-the-art performance and reliability, are presented.
Keywords :
capacitor switching; micromechanical devices; ubiquitous computing; varactors; FR MEMS packaging; RF MEMS reliability; base stations; device requirements; high-volume manufacturing; mobile handsets; satellites application; state-of-the-art performance; switchable capacitors; switches; system-level justification; system-level motivation; ubiquitous wireless connectivity; varactors; Base stations; Capacitors; Fabrication; Manufacturing; Radiofrequency microelectromechanical systems; Satellites; Switches; Telephone sets; Ubiquitous computing; Varactors;
Journal_Title :
Microwave Magazine, IEEE
DOI :
10.1109/MMW.2004.1380277
