Title :
Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation
Author :
Geen, John A. ; Sherman, Steven J. ; Chang, John F. ; Lewis, Stephen R.
Author_Institution :
Micromachine Products Div., Analog Devices Inc., Cambridge, MA, USA
fDate :
12/1/2002 12:00:00 AM
Abstract :
The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm×3 mm chip with a 3-μm BiCMOS process. It has a 4-μm-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV/°/S sensitivity, 10 000:1 dynamic range, 30 000-gee shock survival, and -55°C to +85°C operating temperature.
Keywords :
BiCMOS analogue integrated circuits; elemental semiconductors; gyroscopes; micromachining; micromechanical devices; silicon; -55 to 85 degC; 3 micron; 4 micron; 5 V; 6 mA; Allan deviation; BiCMOS analog circuits; Si; dynamic range; gyroscope; microelectromechanical systems; operating temperature; polysilicon structure; sensitivity; shock survival; surface micromachining; translinear loops; Acceleration; Accelerometers; BiCMOS integrated circuits; Displacement measurement; Force measurement; Gyroscopes; Impedance; Resonant frequency; Signal resolution; Substrates;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.2002.804345
