Title :
Deposition and characterization of thin ferroelectric lead lanthanum zirconate titanate (PLZT) films on sapphire for spatial light modulators applications
Author :
Krishnakumar, S. ; Ozguz, V.H. ; Fan, C. ; Cozzolino, C. ; Esener, S.C. ; Lee, S.H.
Author_Institution :
ECE Dept., California Univ., San Diego, La Jolla, CA, USA
Abstract :
Ferroelectric lead lanthanum zirconate titanate (PLZT) films are deposited on R-plane sapphire using RF triode magnetron sputtering. Perovskite PLZT films with the desired composition (9/65/35) are obtained using compensated deposition techniques around 500 degrees C and postdeposition annealing at 650 degrees C. The deposited films exhibit good optical and electrooptical properties. The room temperature dielectric constant of the films was 1800 at 10 kHz. The refractive index of the films was in the range of 2.2-2.5. The films showed a quadratic electrooptic effect with R=0.6 *10/sup -16/ m/sup 2//V/sup 2/. The development of PLZT on silicon-on-sapphire smart spatial light modulators using these films is also explored.<>
Keywords :
electro-optical effects; ferroelectric materials; ferroelectric thin films; lanthanum compounds; lead compounds; optical modulation; permittivity; refractive index; sputter deposition; sputtered coatings; 10 kHz; 500 degC; 650 degC; Al/sub 2/O/sub 3/; Al/sub 2/O/sub 3/-Si-PLZT; Al2O3-Si-PbLaZrO3TiO3; PbLaZrO3TiO3; RF triode magnetron sputtering; compensated deposition techniques; deposition; electrooptical properties; optical properties; perovskite films; postdeposition annealing; refractive index; room temperature dielectric constant; sapphire; smart spatial light modulators; thin ferroelectric PLZT films; Annealing; Ferroelectric films; Ferroelectric materials; Lanthanum; Optical films; Optical refraction; Optical variables control; Radio frequency; Sputtering; Titanium compounds;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
