Title :
Physical structure of lithium niobate thin films
Author :
Rost, Timothy A. ; Rabson, Thomas A. ; Stone, Barbara A. ; Callahan, Daniel L. ; Baumann, Robert C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Rice Univ., Houston, TX, USA
Abstract :
Thin films of LiNbO have been RF sputter deposited on silicon and sapphire substrates. A number of analytical techniques have been used to determine the physical structure of these films. This analysis shows that the resulting films are stoichiometric LiNbO/sub 3/ and oriented polycrystalline in nature. It is now possible to consider applications which utilize the unique properties of these films.<>
Keywords :
ferroelectric thin films; lithium compounds; piezoelectric thin films; sputtered coatings; stoichiometry; Al/sub 2/O/sub 3/ substrate; LiNbO; RF sputter deposition; Si substrate; oriented polycrystalline thin films; physical structure; sapphire substrates; stoichiometric thin films; Lithium niobate; Niobium compounds; Optical films; Plasma temperature; Radio frequency; Semiconductor films; Silicon; Sputtering; Substrates; Transistors;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
